Pernament Dry Films Microfluidics for MEMS and BIOCHIPS

£56.00£355.00

FY 3005 is a solvent type permanent dry film for special MEMS applications. The FY3005  used in conjunction with supporting Chemistry product line CFC free: FY Developer and FY Rinse, offer the following high level characteristics:

  • Excellent resolution
  • Excellent heat resistance
  • Excellent chemical resistance
  • High stability
  • Biocompatibility

FY3005 pernament films can be used for sealing application, due to the capability to be pressed.

Available Options:

 FY 3005 is a solvent type permanent dry film for special MEMS applications. The FY3005  used in conjunction with the supporting Chemistry product line CFC free: FY Developer and FY Rinse, offer the following high level characteristics:

  • Excellent resolution
  • Excellent heat resistance
  • Excellent chemical resistance
  • High stability
  • Bio compatibility

FY3005 permanent films can be used for sealing application, due to the capability to be pressed together.

MAIN FEATURES
  • Excellent chemical resistance
  • Biocompatibility
TYPICAL APPLICATIONS
  • MEMS
  • Sealing application
AVAILABLE THICKNESS
  • 17 μm (0.7 mils), 20 μm (0.8 mils)
  • 30 μm (1.2 mils) and 55 μm (2.2 mils)
  • Different thickness available on request
EXPOSURE
Expose on a Fortex UV Exposure unit
HOLD TIME AFTER EXPOSURE

We recommend a minimum hold time after exposure of at least 15 minutes.

DEVELOPING

FY3005 Pernmanet film can be developed with spray, paddle or dipping method.
Using FY Developer in dipping process at room temperature Break Point should be between 60% and 80% depend on application. Use FY Rinse to remove scum and clean the surface.

If final rinse with DI water is necessary an intermediate rinse with IPA is suggested.

POST BAKE

After developing is necessary a post-baking at 150°C for 30 – 60min.

STRIPPING

FY3005 can be stripped only before post bake.

RESIST PROFILE

For the test we used a 55 μm thickness dry film, laminated on SiO2 wafer.

 

Film

FY3005-17UM (0.7MILS), FY3005-20UM (0..8MILS), FY3005-30 (1.2MILS), FY3005-55 (2.2MILS), FY3005-DEV, FY3005-RINSE